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Nano- And Microelectromechanical Resonators

INV-16015 Background Micro Electro Mechanical (MEM) resonators are key enablers for the development of miniaturized and low power multi-band radio-frequency (RF) systems capable of operating in the extremely crowded modern commercial and military spectral environment. Recently, the complete maturation of the Aluminum Nitride (AlN) Film-Bulk-Acoustic...

Published: 1/27/2025 | Updated: 3/21/2024 | Inventor(s): Matteo Rinaldi, Yu Hui, Zhenyun Qian, Cristian Cassella

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Category(s): -Nanotechnology, Technology Classifications > 2. Physical Science > Electronics/Semiconductors

Aluminum Nitride Piezoelectric NEMS devices using 2-Dimensional Electrode Material

INV-13074 Background Traditional IR detectors based on semiconductor photon-detectors need cryogenic cooling, making them bulky, costly and inconvenient to use. Uncooled IR thermal detectors based on bolometric principle have been recently developed, which are much smaller, lighter, cheaper and power-efficient, making them good alternatives to semiconductor...

Published: 1/27/2025 | Updated: 3/21/2024 | Inventor(s): Matteo Rinaldi, Yu Hui, Zhenyun Qian

Keywords(s): Materials, Mechanical, MEMS, Nanotechnology, Sensor Technology

Category(s): -Sensors tech, -Nanotechnology, -Chemistry, -Materials